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Conference Paper
Quantum Electronics and Laser Science Conference
San Jose, California United States
May 4-9, 2008
ISBN: 978-1-55752-859-9
CLEO/QELS Poster Session II (JWA)

Excimer Laser Micromachining of Glass Substrates

Deepa M. Bhatt, Karen Williams, David A. Hutt, and Paul P. Conway

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Abstract

Excimer laser machining of microvias and tracks in CMZ glass (100 µm thick) at 248nm has been investigated and optimised in order to minimise hole taper, microcracking and debris.

© 2008 Optical Society of America

OCIS Codes
(140.0140) Lasers and laser optics : Lasers and laser optics
(140.2180) Lasers and laser optics : Excimer lasers
(140.3390) Lasers and laser optics : Laser materials processing

Citation
D. M. Bhatt, K. Williams, D. A. Hutt, and P. P. Conway, "Excimer Laser Micromachining of Glass Substrates," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest (CD) (Optical Society of America, 2008), paper JWA1.
http://www.opticsinfobase.org/abstract.cfm?URI=QELS-2008-JWA1


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