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Conferences > QELS > 2008 > JWA > JWA80
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper JWA80

Analysis of Resolution and Feature Size in Extreme Ultraviolet Microscopy Images

M.C. Marconi, P.W. Wachulak, C. Brewer, F. Brizuela, R. Bartels, C.S. Menoni, J.J. Rocca, E. Anderson, and Weilun Chao

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Abstract

We describe a correlation algorithm that allows for the simultaneous determination of object size and resolution in images of nanoscale objects. The method was used to analyze images recorded with a 13.2 nm laser.

© 2008 Optical Society of America

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