We describe a correlation algorithm that allows for the simultaneous determination of object size and resolution in images of nanoscale objects. The method was used to analyze images recorded with a 13.2 nm laser.
© 2008 Optical Society of America
M. C. Marconi, P. W. Wachulak, C. A. Brewer, F. Brizuela, R. Bartels, C. S. Menoni, J. J. Rocca, E. H. Anderson, and W. Chao, "Analysis of Resolution and Feature Size in Extreme Ultraviolet Microscopy Images," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest (CD) (Optical Society of America, 2008), paper JWA80.
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