Oxygen plasma immersion ion implantation (PIII) was introduced to modify indium-tin-oxide (ITO) films. X-ray photoemission spectroscopy (XPS) was employed to characterize the elements ratio and core level spectra of O1s at the surface of ITO.
© 2012 OSA
L. He, F. Xiaoxuan, O. Qiongrong, and L. Rongqing, "X-ray Photoemission Spectroscopy Studies of Indium-tin-oxide Films Treated by Oxygen Plasma Immersion Ion Implantation," in Renewable Energy and the Environment Optics and Photonics Congress, OSA Technical Digest (online) (Optical Society of America, 2012), paper LM4A.5.
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