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Conference Paper
Solid-State and Organic Lighting
Eindhoven Netherlands
November 11-14, 2012
ISBN: 978-1-55752-952-7
Transparent Conductor & Packaging (LM4A)

X-ray Photoemission Spectroscopy Studies of Indium-tin-oxide Films Treated by Oxygen Plasma Immersion Ion Implantation

Long He, Fan Xiaoxuan, Ou Qiongrong, and Liang Rongqing  »View Author Affiliations


http://dx.doi.org/10.1364/SOLED.2012.LM4A.5


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Abstract

Oxygen plasma immersion ion implantation (PIII) was introduced to modify indium-tin-oxide (ITO) films. X-ray photoemission spectroscopy (XPS) was employed to characterize the elements ratio and core level spectra of O1s at the surface of ITO.

© 2012 OSA

OCIS Codes
(160.6000) Materials : Semiconductor materials
(240.0310) Optics at surfaces : Thin films
(310.3840) Thin films : Materials and process characterization

Citation
L. He, F. Xiaoxuan, O. Qiongrong, and L. Rongqing, "X-ray Photoemission Spectroscopy Studies of Indium-tin-oxide Films Treated by Oxygen Plasma Immersion Ion Implantation," in Renewable Energy and the Environment Optics and Photonics Congress, OSA Technical Digest (online) (Optical Society of America, 2012), paper LM4A.5.
http://www.opticsinfobase.org/abstract.cfm?URI=SOLED-2012-LM4A.5


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