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Conference Paper
Signal Recovery and Synthesis
Toronto Canada
July 10-14, 2011
ISBN: 978-1-55752-914-5
Optical Processing & Algorithms (SMD)

Three-dimensional Surface Recovery with a Regularized Multi-frame Phase Shift Algorithm

Fuqin Deng and Edmund Y. Lam  »View Author Affiliations


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We develop a modified four-frame phase shift algorithm that incorporates a smoothness constraint. This is applied to a high-precision full-profile reconstruction and measurement for integrated circuit packages.

© 2011 OSA

OCIS Codes
(110.6880) Imaging systems : Three-dimensional image acquisition
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(150.3040) Machine vision : Industrial inspection

F. Deng and E. Y. Lam, "Three-dimensional Surface Recovery with a Regularized Multi-frame Phase Shift Algorithm," in Imaging and Applied Optics, OSA Technical Digest (CD) (Optical Society of America, 2011), paper SMD3.

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