We develop a modified four-frame phase shift algorithm that incorporates a smoothness constraint. This is applied to a high-precision full-profile reconstruction and measurement for integrated circuit packages.
© 2011 OSA
(110.6880) Imaging systems : Three-dimensional image acquisition
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(150.3040) Machine vision : Industrial inspection
F. Deng and E. Y. Lam, "Three-dimensional Surface Recovery with a Regularized Multi-frame Phase Shift Algorithm," in Imaging and Applied Optics, OSA Technical Digest (CD) (Optical Society of America, 2011), paper SMD3.
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