Non-destructive sensor for the measurement of thickness and refractive index of polymeric layers deposit on glass bases. The sensor is oriented to the manufacture of polymers for O-PCB interconnects. Michelson FOLCI configuration has been applied. Article not available.
© 2010 The Optical Society
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(310.0310) Thin films : Thin films
(310.6860) Thin films : Thin films, optical properties
S. Fabiani, M. Farina, A. Di Donato, A. Lucesoli, and T. Rozzi, "Low-Coherence Interferometry Optical Sensor for the Characterization of Deposited Thin Film," in Advanced Photonics & Renewable Energy, OSA Technical Digest (CD) (Optical Society of America, 2010), paper SWD6.