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Conference Paper
Optical Sensors
Karlsruhe Germany
June 21-24, 2010
ISBN: 978-1-55752-896-4
Sensor Systems II (SWD)

Low-Coherence Interferometry Optical Sensor for the Characterization of Deposited Thin Film

Silvia Fabiani, Marco Farina, Andrea Di Donato, Agnese Lucesoli, and Tullio Rozzi

http://dx.doi.org/10.1364/SENSORS.2010.SWD6


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Abstract

Non-destructive sensor for the measurement of thickness and refractive index of polymeric layers deposit on glass bases. The sensor is oriented to the manufacture of polymers for O-PCB interconnects. Michelson FOLCI configuration has been applied. Article not available.

© 2010 The Optical Society

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(310.0310) Thin films : Thin films
(310.6860) Thin films : Thin films, optical properties

Citation
S. Fabiani, M. Farina, A. Di Donato, A. Lucesoli, and T. Rozzi, "Low-Coherence Interferometry Optical Sensor for the Characterization of Deposited Thin Film," in Advanced Photonics & Renewable Energy, OSA Technical Digest (CD) (Optical Society of America, 2010), paper SWD6.
http://www.opticsinfobase.org/abstract.cfm?URI=Sensors-2010-SWD6

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