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Soft X-ray interferometer for time-resolved diagnostics of laser-aided nano-fabrication

Tohru Suemoto, Kota Terakawa, Yasuo Minami, Yoshihiro Ochi, Noboru Hasegawa, Tetsuya Kawachi, Takuro Tomita, Minoru Yamamoto, and Manato Deki

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Abstract

An interferometer is constructed utilizing 13.9 nm radiation from a plasma-based soft X-ray laser. Single-shot measurement with a time-resolution of 7 ps is performed to observe the initial stage of the ablation process in platinum.

© 2010 Optical Society of America

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