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Phase-shifting lateral shearing interferometry using wedge-plate and interferometric grating

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Abstract

A simple and robust method for introducing a phase-shifting test procedure in a wedge-plate shearing interferometer is proposed. The output of the wedge-plate lateral shearing interferometer (LSI) is superposed onto a sinusoidal grating, forming a moiré pattern. The in-plane translation of grating perpendicular to the grating lines is used for introducing a known amount of phase shifts in the interferometer. Direct measurement of phase using a four-step phase-shifting method is undertaken. The applicability of this devised phase-shifting wedge-plate LSI has been successfully tested for setting the collimation position of optical beams. Good accuracy and precision are achieved.

© 2014 Optical Society of America

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