Abstract

A highly sensitive refractive index (RI) sensor using a resonant grating waveguide on a metal substrate was developed. A fully etched low RI grating on a metal substrate was used as the resonant grating. Since the RI of the grating waveguide was low, the light-coupling condition covered with the liquid to be measured was sensitive to changes in the RI of the liquid. The calculated sensitivity of the resonant angle to changes in the RI was 154°/RIU, and the full width at half maximum (FWHM) of the resonant angle was 0.2°. A sensitivity of 123°/RIU and FWHM of 1.2° were experimentally obtained.

© 2015 Optical Society of America

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