Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
  • Chinese Optics Letters
  • Vol. 12,
  • Issue 8,
  • pp. 080501-
  • (2014)

Parallel laser writing system with scanning Dammann lithography

Not Accessible

Your library or personal account may give you access

Abstract

Scanning Dammann lithography (SDL) is proposed and implemented, which uses a Dammann grating to generate multiple beams with sharp step boundary for writing large-sized gratings efficiently. One of the most attractive advantages is that this technique can accelerate the writing speed, e.g. 1 × 32 Dammann grating can be 32 times faster than the single laser scanning system. More importantly, the uniformity of the multi-beams-written lines is much better than the single laser beam scanning system in consideration of the environmental effects such as air turbulence, thermal instability, etc. Using the SDL system, a three-port high-efficiency beam splitter at visible wavelengths is fabricated quickly, and the theoretical and experimental diffraction efficiencies are both higher than 90%. Therefore, SDL should be a useful tool for fabrication of large-sized gratings.

© 2014 Chinese Optics Letters

PDF Article
More Like This
Laser scanner for direct writing lithography

Clemens Rensch, Stefan Hell, Manfred v. Schickfus, and Siegfried Hunklinger
Appl. Opt. 28(17) 3754-3758 (1989)

Dynamic optical coupled system employing even-numbered Dammann gratings

Caihui Di and Changhe Zhou
Appl. Opt. 45(9) 1993-2000 (2006)

Laser direct-writing lithography equipment system for rapid and μm-precision fabrication on curved surfaces with large sag heights

Jun Ai, Qifeng Du, Zhongli Qin, Jianguo Liu, and Xiaoyan Zeng
Opt. Express 26(16) 20965-20974 (2018)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved