Abstract
We design and fabricate compact, low loss, and high port-count optical power
splitters of 1 × 128 and2 × 128 using silica-based planar lightwave circuit (PLC)
technology on 6 inch quartz substrate. PLC technology is mainly based on plasma
enhanced chemical vapor deposition, photolithography, and etching. The measured
results show that the insertion loss, uniformity, and wavelength-dependent loss of 1
× 128 and 2 × 128 optical power splitters are less than 23, 1.43, and 0.92 dB and
23.3, 1.8, and 1.3 dB, respectively, in the wavelength range from 1.26 to 1.65 mm.
The polarization-dependent losses are less than 0.16 and 0.2 dB, respectively, in
the wavelengths of 1.31, 1.49, and 1.55 mm.
© 2014 Chinese Optics Letters
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