Abstract
Highly conducting ZnO:Al (AZO) films are normally prepared through substrate
heating and post-annealing in reducing atmosphere, which is deleterious to maintain
the high transparency of films and the overall solar cell performance. Here we
fabricate AZO films through one-step sputtering at room temperature using
oxygen-deficient targets prepared via double crucible method. The best-performed AZO
film achieves a low resistivity of 4.4 × 10-4 . cm, a high haze factor of 35.0%, and
optimizes the efficiency of Cu (In, Ga)Se2 solar cell with a high value of 14.15%.
This letter demonstrates that oxygen deficiency can induce high surface texture,
conductivity, and boost solar cell performance.
© 2014 Chinese Optics Letters
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