Abstract

We prepare SiO₂ coatings on different substrates by either electron-beam evaporation or dual ion-beam sputtering. The relative transmittances of the SiO₂ coatings are measured during the heating process. The SiO₂ coating microstructures are studied. Results indicate that the intensity and peak position of moisture absorption are closely related to the microstructures of the coatings. The formation of microstructures depends not only on the preparation process of the coatings but also on the substrate characteristics.

© 2015 Chinese Laser Press

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