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Optica Publishing Group
  • Chinese Optics Letters
  • Vol. 3,
  • Issue 10,
  • pp. 589-592
  • (2005)

A novel method to determine the FOCAL energy range

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Abstract

Determination of the energy range is an important precondition of focus calibration using alignment procedure (FOCAL) test. A new method to determine the energy range of FOCAL off-lined is presented in this paper. Independent of the lithographic tool, the method is time-saving and effective. The influences of some process factors, e.g. resist thickness, post exposure bake (PEB) temperature, PEB time and development time, on the energy range of FOCAL are analyzed.

© 2005 Chinese Optics Letters

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