Abstract
Three-dimensional inverted-woodpile (WP) structures were embedded in a microchannel by femtosecond laser direct-writing of fused silica followed by chemical etching with diluted hydrofluoric acid. We show the hole size is linearly dependent on laser-scanning depth for various pulse energies, permitting the control of laser exposures to facilitate close 5 µm periodic packing of uniform microcapillary arrays. Exposure compensation for depth-dependent etching rate and optical beam aberrations yielded stable and crack-free uniform inverted-WP structures. The direct formation of the inverted-WP structure together with microchannels in an all-fused silica substrate, offers chemical stability and inertness, and biocompatibility to be exploited as new microfluidic systems for chromatography and electro-osmotic pumps.
©2012 Optical Society of America
Full Article | PDF ArticleMore Like This
C. Hnatovsky, R. S. Taylor, E. Simova, V. R. Bhardwaj, D. M. Rayner, and P. B. Corkum
Opt. Lett. 30(14) 1867-1869 (2005)
Shengguan He, Feng Chen, Keyin Liu, Qing Yang, Hewei Liu, Hao Bian, Xiangwei Meng, Chao Shan, Jinhai Si, Yulong Zhao, and Xun Hou
Opt. Lett. 37(18) 3825-3827 (2012)
Zhi Wang, Lan Jiang, Xiaowei Li, Andong Wang, Zhulin Yao, Kaihu Zhang, and Yongfeng Lu
Opt. Lett. 43(1) 98-101 (2018)