Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Direct nanopatterning of 100 nm metal oxide periodic structures by Deep-UV immersion lithography

Not Accessible

Your library or personal account may give you access

Abstract

Deep-UV lithography using high-efficiency phase mask has been developed to print 100 nm period grating on sol-gel based thin layer. High efficiency phase mask has been designed to produce a high-contrast interferogram (periodic fringes) under water immersion conditions for 244 nm laser. The demonstration has been applied to a new developed immersion-compatible sol-gel layer. A sol-gel photoresist prepared from zirconium alkoxides caped with methacrylic acids was developed to achieve 50 nm resolution in a single step exposure. The nanostructures can be thermally annealed into ZrO2. Such route considerably simplifies the process for elaborating nanopatterned surfaces of transition metal oxides, and opens new routes for integrating materials of interest for applications in the field of photocatalysis, photovoltaic, optics, photonics or microelectronics.

© 2012 Optical Society of America

Full Article  |  PDF Article
More Like This
100 nm period grating by high-index phase-mask immersion lithography

Yannick Bourgin, Yves Jourlin, Olivier Parriaux, Anne Talneau, Svetlen Tonchev, Colette Veillas, Petri Karvinen, Nicolas Passilly, Ahmad R. Md Zain, Richard M. De La Rue, Jürgen Van Erps, and David Troadec
Opt. Express 18(10) 10557-10566 (2010)

“Double” displacement Talbot lithography: fast, wafer-scale, direct-writing of complex periodic nanopatterns

Pierre Chausse, Emmanuel Le Boulbar, Pierre-Marie Coulon, and Philip A. Shields
Opt. Express 27(22) 32037-32046 (2019)

Total absorption of TM polarized light in a 100 nm spectral band in a nanopatterned thin a-Si film

Wenhua Wu and Robert Magnusson
Opt. Lett. 37(11) 2103-2105 (2012)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved