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CMOS-compatible hybrid plasmonic modulator based on vanadium dioxide insulator-metal phase transition

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Abstract

To extend the application of an emerging plasmonic material, vanadium dioxide (VO2), in silicon photonics technology, we propose a complementary metal-oxide-semiconductor (CMOS)-compatible hybrid plasmonic modulator using an VO2 insulator-metal phase transition. The optical device is based on a directional coupler that consists of a Si waveguide and a SiSiO2VO2SiO2Si hybrid plasmonic waveguide. By electrically triggering the phase of VO2 with a driving voltage of 2 V, the propagation loss of the hybrid plasmonic waveguide is switched, and hence the output optical power is modulated. The on/off extinction ratio is larger than 3.0 dB on the entire C-band.

© 2014 Optical Society of America

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