Abstract
To extract true optical properties of samples in a chamber with entrance and exit optical windows, oftentimes the windows were approximated as simple retarders where the retardation was small and premeasured under a given condition. The proposed method allows to cope with large birefringent effect of chamber windows thanks to its capability of extracting ellipsometric parameters (, ) of isotropic samples as well as measuring birefringent parameters (, ) of each window separately and simultaneously. This method is, however, not valid for anisotropic samples. Ex situ results and extracted ellipsometric parameters results from in situ measurements of a silicon substrate and a film thermally grown on the silicon substrate exhibited excellent agreement and provided significance of this method.
© 2014 Optical Society of America
Full Article | PDF ArticleMore Like This
Lianhua Jin, Syouki Kasuga, and Eiichi Kondoh
Opt. Express 22(23) 27811-27820 (2014)
Lianhua Jin, Syouki Kasuga, Eiichi Kondoh, and Bernard Gelloz
Appl. Opt. 54(10) 2991-2998 (2015)
Gerald E. Jellison
Appl. Opt. 38(22) 4784-4789 (1999)