Abstract

We describe a platform for the fabrication of smooth waveguides and ultrahigh-quality-factor ($Q$ factor) silicon resonators using a modified local oxidation of silicon (LOCOS) technique. Unlike the conventional LOCOS process, our approach allows the fabrication of nearly planarized structures, supporting a multilayer silicon photonics configuration. Using this approach we demonstrate the fabrication and the characterization of a microdisk resonator with an intrinsic $Q$ factor that is one of the highest $Q$ factors achieved with a compact silicon-on-insulator platform.

© 2015 Optical Society of America

High-Q and high finesse silicon microring resonator

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