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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 10, Iss. 12 — Dec. 1, 1971
  • pp: 2675–2678

Antireflection Coatings for Silicon in the 2.5–50-μm Region

G. H. Sherman and P. D. Coleman  »View Author Affiliations


Applied Optics, Vol. 10, Issue 12, pp. 2675-2678 (1971)
http://dx.doi.org/10.1364/AO.10.002675


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Abstract

It has been found that vacuum-deposited films of CsI, AgCl, TlBr, and TlCl are useful as antireflection coatings for silicon over a broad spectral range in the infrared. Measurements performed on a plane-parallel silicon plate coated with various thicknesses of the above materials yield transmittance values ranging from 99% at λ = 2.9 μm to 88% at λ = 27 μm. Experimental details of the coating process and properties of the coatings are discussed.

© 1971 Optical Society of America

History
Original Manuscript: June 21, 1971
Published: December 1, 1971

Citation
G. H. Sherman and P. D. Coleman, "Antireflection Coatings for Silicon in the 2.5–50-μm Region," Appl. Opt. 10, 2675-2678 (1971)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-10-12-2675


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References

  1. P. D. Coleman, W. Q. Jeffers, C. J. Johnson, C. F. Wittig, D. L. Keune, “Device Aspects of a Far-Infrared Water Vapor Laser,” IEEE International Electron Devices Meeting, Washington, D.C., October 1967.
  2. R. A. McFarlane, L. H. Fretz, Appl. Phys. Lett. 14, 385 (1969). [CrossRef]
  3. K. L. Chopra, Thin Film Phenomena (McGraw-Hill, New York, 1969), pp. 770–772.
  4. C. D. Salzburg, J. J. Villa, J. Opt. Soc. Am. 47, 244 (1957). [CrossRef]
  5. The Sloan Notebook—Suggestions for Thin Film Deposition (Sloan Technology Corporation, Santa Barbara, California).
  6. Handbook of Chemistry and Physics (Chemical Rubber Publishing Co., Cleveland, 1961), 43rd ed.
  7. D. E. McCarthy, Appl. Opt. 2, 591 (1963). [CrossRef]
  8. D. E. McCarthy, Appl. Opt. 4, 317 (1965). [CrossRef]
  9. W. S. Rodney, J. Opt. Soc. Am. 45, 987 (1955). [CrossRef]
  10. L. W. Tilton, E. K. Plyler, R. E. Stephens, J. Opt. Soc. Am. 40, 540 (1950). [CrossRef]
  11. D. E. McCarthy, Appl. Opt. 4, 878 (1965). [CrossRef]

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