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Ellipsometry Using Imperfect Polarizers

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Abstract

Recent work in which reflection polarizers were used to make ellipsometric measurements in the far uv employed the tacit assumption that the incident light was in a coherent state of polarization. However, since the most general state of light, is that of partial polarization, i.e., a mixture of polarized and unpolarized components, a significant modification to the experimental techniques used hitherto is shown to be necessary.

© 1971 Optical Society of America

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Ellipsometry with Imperfect Components Including Incoherent Effects*

R. M. A. Azzam and N. M. Bashara
J. Opt. Soc. Am. 61(10) 1380-1391 (1971)

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