Diffractographic Dimensional Measurement. Part 1: Displacement Measurement
Applied Optics, Vol. 11, Issue 2, pp. 308-313 (1972)
http://dx.doi.org/10.1364/AO.11.000308
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Abstract
This is the first of a two-part paper on measurement of displacement and profile using changes in the farfield diffraction patterns of a slit aperture formed between a test and reference object. When applied to displacement measurement the method is very accurate over a considerable range, noncontacting, linear, and easy to use. In addition to the measurement considerations involved in this diffractographic technique, three unique applications are discussed. These are: simultaneous deflection measurement along a line, deflection measurement of a surface relative to an edge, and vibration amplitude measurement using time-averaged fringes.
Citation
T. R. Pryor, O. L. Hageniers, and W. P. T. North, "Diffractographic Dimensional Measurement. Part 1: Displacement Measurement," Appl. Opt. 11, 308-313 (1972)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-11-2-308
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