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Automatic Wavefront Error Sensor

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Abstract

The automatic wavefront error sensor has been developed for determining the wavefront error of an optical system. The instrument, which provides a null test for a parabola, measures the ray intercept error and automatically converts this to a wavefront error. Both the ray fan plot and the wavefront error curve are plotted simultaneously. Ray intercept errors smaller than 0.1 μm can be measured, providing wavefront error information with interferometric sensitivity.

© 1973 Optical Society of America

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