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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 17, Iss. 20 — Oct. 15, 1978
  • pp: 3284–3289

Surface profile measurement and angular deflection monitoring using a scanning laser beam: a noncontact method

F. M. Smolka and T. P. Caudell  »View Author Affiliations


Applied Optics, Vol. 17, Issue 20, pp. 3284-3289 (1978)
http://dx.doi.org/10.1364/AO.17.003284


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Abstract

A noncontact method for measuring the surface profile of a reflecting surface is presented. The scheme is based on the measurement of the phase difference between a surface reflected laser beam and a reference beam. Both beams are scanned past a photodetector by means of a rotating beam splitter. The slope of the surface at various points is electronically obtained, and then the surface profile in a plane is determined by direct integration. The accuracy of the method falls between the more elaborate interferometric techniques and mechanical contact schemes. A complete theoretical analysis of the method is presented as well as the results of various experimental tests.

© 1978 Optical Society of America

History
Original Manuscript: April 8, 1978
Published: October 15, 1978

Citation
F. M. Smolka and T. P. Caudell, "Surface profile measurement and angular deflection monitoring using a scanning laser beam: a noncontact method," Appl. Opt. 17, 3284-3289 (1978)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-17-20-3284


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References

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