Three-beam interferometric profilometer
Applied Optics, Vol. 22, Issue 12, pp. 1893-1897 (1983)
http://dx.doi.org/10.1364/AO.22.001893
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Abstract
A noncontact optical technique for the measurement of thin-film thickness and surface roughness with 25-Å and 2-µm vertical and horizontal resolutions, respectively, has been described. It is based on a commonpath three-beam shearing interferometer, in which the outer beams act as a reference while the middle beam scans the surface. The results of this technique are comparable with the ones obtained with a stylus instrument.
© 1983 Optical Society of America
Citation
Kais Almarzouk, "Three-beam interferometric profilometer," Appl. Opt. 22, 1893-1897 (1983)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-22-12-1893
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