OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 22, Iss. 14 — Jul. 15, 1983
  • pp: 2060–2067

Silicon wedge


Applied Optics, Vol. 22, Issue 14, pp. 2060-2067 (1983)


View Full Text Article

Enhanced HTML    Acrobat PDF (2142 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations
  • Export Citation/Save Click for help

Abstract

The task was to make a wedge in silicon 2.362 in. long × 0.392 in. wide and only 0.032 in. thick. This was accomplished on an opposed face polishing machine whose laps rotate in opposite directions. This precludes putting the pressure all on one side as would be done if the laps rotated in the same direction. This feature has enabled very thin, highly accurate substrates to be made. It is of special value when working with friable material such as calcium fluoride. The septum must be thinner than the work and without wrinkles. By stretching the thin Mylar these wrinkles are avoided. The procedure is explained in the illustrations. Note that the usual method of planetary lapping always pushes on one edge of the crystal, which is acceptable when polishing rigid thick material. When the laps rotate in opposite directions the polishing forces are divided equally between top and bottom surfaces. Readers are also referred to our column “ About Flats and Parallels” Appl. Opt. 5, No. 7 (July 1966).

© 1983 Optical Society of America

Citation
, "Silicon wedge," Appl. Opt. 22, 2060-2067 (1983)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-22-14-2060

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited