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Applied Optics

Applied Optics


  • Vol. 22, Iss. 20 — Oct. 15, 1983
  • pp: 3220–3228

Optical elements with ultrahigh spatial-frequency surface corrugations

Rolf C. Enger and Steven K. Case  »View Author Affiliations

Applied Optics, Vol. 22, Issue 20, pp. 3220-3228 (1983)

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In this paper we discuss the properties of optical elements fabricated by holographically recording an ultrahigh spatial-frequency pattern in a photoresist mask followed by reactive ion etching to transfer this pattern into the surface of a quartz substrate. Such optical elements are environmentally durable, potentially easy to replicate, and exhibit diffraction efficiencies in excess of 85%. In addition, two other properties are reported for the first time. Such elements at normal (0°) incidence are antireflective, with broadband reflection coefficients as low as 0.035%. Also, the elements exhibit artificially produced birefringence making them useful as wave plates. These results may be particularly significant in the UV and IR, where damage-resistant antireflection coatings and transparent birefringent materials may not exist.

© 1983 Optical Society of America

Original Manuscript: June 29, 1983
Published: October 15, 1983

Rolf C. Enger and Steven K. Case, "Optical elements with ultrahigh spatial-frequency surface corrugations," Appl. Opt. 22, 3220-3228 (1983)

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