A new algorithm for the design of multilayer antireflection coatings (ARC) is developed. This makes use of a closed-loop nonlinear approximation technique to arrive at the exact thickness of each layer. The method offers a simpler and faster optimization procedure. It has been successfully used in the design of broadband ARCs on substrates with a wide range of refractive indices. Detailed analysis of the effect of errors in the refractive index and thickness of each layer, individually and collectively on the ultimate performance of the system, is discussed in detail. To minimize the effects of these errors, in situ correction (dynamic correction) procedure at each stage of development of the system is suggested.

© 1983 Optical Society of America

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