OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 22, Iss. 8 — Apr. 15, 1983
  • pp: 1165–1167

Ion polishing with the aid of a planarizing film

Leo F. Johnson and K. A. Ingersoll  »View Author Affiliations


Applied Optics, Vol. 22, Issue 8, pp. 1165-1167 (1983)
http://dx.doi.org/10.1364/AO.22.001165


View Full Text Article

Enhanced HTML    Acrobat PDF (1170 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

An ion polishing technique employing a planarizing film in conjunction with ion-beam erosion at the planarizing angle was used to remove surface irregularities associated with conventional polishing of optical surfaces. By maintaining a planar surface throughout the erosion process, nonuniform erosion resulting from faceting, redeposition, and ion reflection is eliminated. Smooth surfaces on fused quartz are obtained by erosion of a planarizing film of photoresist at an angle of 60°. The method is applicable to a wide variety of materials and may be useful for removing the surface roughness limitation on the laser-induced damage threshold of optical surfaces.

© 1983 Optical Society of America

History
Original Manuscript: January 6, 1983
Published: April 15, 1983

Citation
Leo F. Johnson and K. A. Ingersoll, "Ion polishing with the aid of a planarizing film," Appl. Opt. 22, 1165-1167 (1983)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-22-8-1165


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. A. B. Meinel, S. Bashkin, D. A. Loomis, Appl. Opt. 4, 1674 (1965). [CrossRef]
  2. L. H. Narodny, M. Tarasevich, Appl. Opt. 6, 2010 (1967). [CrossRef] [PubMed]
  3. A. R. Bayly, P. D. Townsend, Opt. Laser Technol. 2, 117 (1970). [CrossRef]
  4. J. B. Schroeder, H. D. Dieselman, J. W. Douglass, Appl. Opt. 10, 295 (1971). [CrossRef] [PubMed]
  5. A. M. Karger, Appl. Opt. 12, 451 (1973). [CrossRef] [PubMed]
  6. A. D. Pearson, W. B. Harsell, Mater. Res. Bull. 7, 567 (1972). [CrossRef]
  7. R. A. Hoffman, W. J. Lange, W. J. Choyke, Appl. Opt. 14, 1803 (1975). [CrossRef] [PubMed]
  8. R. A. House, J. R. Bettis, A. H. Guenther, Appl. Opt. 16, 1486 (1977). [CrossRef]
  9. P. D. Davidse, J. Electrochem. Soc. 116, 100 (1969). [CrossRef]
  10. C. R. Giuliano, Appl. Phys. Lett. 21, 39 (1972). [CrossRef]
  11. E. G. Spencer, P. H. Schmidt, J. Vac. Sci. Technol. 8, S52 (1971). [CrossRef]
  12. A. D. G. Stewart, M. W. Thompson, J. Mater. Sci. 4, 56 (1969). [CrossRef]
  13. G. Carter, J. S. Colligon, M. J. Nobes, J. Mater. Sci. 6, 115 (1971). [CrossRef]
  14. D. J. Barber, F. C. Frank, M. Moss, J. W. Steeds, I. S. T. Tsong, J. Mater. Sci. 8, 1030 (1973). [CrossRef]
  15. J. P. Ducommun, M. Cantagrel, M. Marchal, J. Mater. Sci. 9, 725 (1974). [CrossRef]
  16. A. R. Bayly, J. Mater. Sci. 7, 404 (1972). [CrossRef]
  17. L. F. Johnson, K. A. Ingersoll, D. Kahng, Appl. Phys. Lett. 40, 636 (1982). [CrossRef]
  18. L. F. Johnson, K. A. Ingersoll, J. V. Dalton, to be published, J. Vac. Sci. Technol.Apr.–Jun.1983.
  19. S. Somekh, J. Vac. Sci. Technol. 13, 1003 (1976). [CrossRef]
  20. L. D. Bollinger, Solid State Technol. 20, 66 (1977).
  21. T. Nishimura, H. Aritome, S. Namba, IEEE J. Quantum Electron. QE-16, 1337 (1980). [CrossRef]
  22. N. Laegreid, G. K. Wehner, J. Appl. Phys. 32, 365 (1961). [CrossRef]
  23. D. J. Sharp, J. K. G. Panitz, D. M. Mattox, J. Vac. Sci. Technol. 16, 1879 (1979). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 
Fig. 4
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited