Abstract

A microwave-powered ultraviolet source capable of covering an area as large as a 150-mm Si wafer is developed. Fifteen low pressure mercury discharge lamps are arrayed in a flat microwave cavity. The Hg 254-nm irradiance on the surface 1 cm from the lamps is 120 mW/cm² at a microwave power of 1200 W. This UV source is used for photoresist removal. Low pressure cadmium lamps, which have the Cd 229-nm irradiance of 13.9 mW/cm² at 1 cm for a 500-W input, are also investigated.

© 1990 Optical Society of America

A Microwave-Powered Hydrogen Lamp for Vacuum Ultraviolet Photochemical Research

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Low-Pressure Mercury Arc for Ultraviolet Calibration

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