Abstract
A technique to measure the spectral distribution in a cross section of a KrF laser beam is described. Two-dimensional distribution, pulse-by-pulse fluctuation, and long term variation of the spectrum of the laser beam are measured with this method.
© 1990 Optical Society of America
Full Article | PDF ArticleMore Like This
Shintaro Kawata, Ikuo Hikima, Yutaka Ichihara, and Shuntaro Watanabe
Appl. Opt. 31(3) 387-396 (1992)
Robert W. Pitz, Joseph A. Wehrmeyer, J. M. Bowling, and Tsarng-Sheng Cheng
Appl. Opt. 29(15) 2325-2332 (1990)
Enrico Nichelatti and Gianemilio Salvetti
Appl. Opt. 34(22) 4703-4712 (1995)