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Inversion of reflection ellipsometric data

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Abstract

The dielectric constant of an isotropic homogeneous layer on an isotropic substrate is shown to satisfy a quintic equation, with the coefficients determined by |ρ|2 and Re(ρ), where ρ = r p/r s, is found ellipsometrically. This algebraic equation eliminates many (but not all) of the nonphysical roots in the inversion of ellipsometric data. A simple form is obtained if the angle of incidence is equal to the Brewster angle of the substrate. The problem of inversion for thin films is also discussed.

© 1994 Optical Society of America

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