The normal-incidence reflectance of ion-beam-deposited boron carbide thin films has been evaluated in the extreme ultraviolet (EUV) spectral region. High-reflectance coatings have been produced with reflectances greater than 30% between 67 and 121.6 nm. This high reflectance makes ion-beam-deposited boron carbide an attractive coating for EUV applications.
© 1994 Optical Society of America
G. M. Blumenstock and Ritva A. M. Keski-Kuha, "Ion-beam-deposited boron carbide coatings for the extreme ultraviolet," Appl. Opt. 33, 5962-5963 (1994)