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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 34, Iss. 10 — Apr. 1, 1995
  • pp: 1684–1691

Reflection–transmission photoellipsometry: theory and experiments

G. Bader, P. V. Ashrit, F. E. Girouard, and Vo-Van Truong  »View Author Affiliations


Applied Optics, Vol. 34, Issue 10, pp. 1684-1691 (1995)
http://dx.doi.org/10.1364/AO.34.001684


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Abstract

We propose a method that uses reflection and transmission photoellipsometry to analyze samples consisting of thin films combined with semitransparent thick layers or substrates in the form of multilayer structures. A thick film or substrate is defined as a layer for which no interference effects can be observed for a given wavelength resolution, and contributions from multiple reflections in the substrate are taken into account in the theoretical treatment. An automatic reflection–transmission spectroscopic ellipsometer was built to test the theory, and satisfactory results have been obtained. Examples corresponding to a strongly absorbing film deposited on a glass substrate and a highly transmitting film also deposited on glass are shown. In both cases a good fit between theory and experiment is found. The photoellipsometric method presented is particularly suited to the analysis of actual samples of energy-efficient coatings for windows.

© 1995 Optical Society of America

History
Original Manuscript: June 13, 1994
Published: April 1, 1995

Citation
G. Bader, P. V. Ashrit, F. E. Girouard, and Vo-Van Truong, "Reflection–transmission photoellipsometry: theory and experiments," Appl. Opt. 34, 1684-1691 (1995)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-34-10-1684


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References

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  2. D. E. Aspnes, “Spectroscopic ellipsometry of solids,” in Optical Properties of Solids: New Developments, B. O. Seraphin, ed. (North-Holland, Amsterdam, 1976), pp. 799–846.
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  6. G. Bader, P. V. Ashrit, F. E. Girouard, Vo-Van Truong, “Reflection and transmission ellipsometry (RTELL) of multilayer structures on transparent substrates: theory,” GRCMES Rep. 12 (Université de Moncton, New Brunswick, Canada, 1993).
  7. P. V. Ashrit, G. Bader, S. Badilescu, F. E. Girouard, L. Q. Nguyen, Vo-Van Truong, “Dielectric constants of silver particles finely dispersed in a gelatin film,” J. Appl. Phys. 74, 602–606 (1993). [CrossRef]
  8. J.-Th. Zettler, L. Schrottke, “Ellipsometric characterization of layers on transparent semiconductor wafers,” Phys. Status Solidi 163, K69–K74 (1991). [CrossRef]
  9. I. Hamberg, C. G. Granqvist, “Evaporated Sn-doped In2O3 films: basic optical properties and applications to energy-efficient windows,” J. Appl. Phys. 60, R123–R159 (1986). [CrossRef]
  10. P. V. Ashrit, K. Benaissa, G. Bader, F. E. Girouard, Vo-Van Truong, “Lithiation studies on some transition metal oxides for an all-solid thin film electrochromic system,” Solid State Ion. 59, 45–57 (1993). [CrossRef]
  11. C. M. Lampert, C. G. Granqvist, eds., Large Area Chromogenics: Materials and Devices for Transmittance Control Vol. IS4 of SPIE Institute Series (Society of Photo-Optical Instrumentation Engineers, Bellingham, Wash., 1990).

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