We have developed fluoride antireflection (AR) coatings on MgF2 substrates for a wavelength of 248 nm by molecular-beam deposition. Transmission and laser-induced damage threshold of the samples were measured and atomic force microscope (AFM) investigations were carried out. We compare a 14-layer design for AR coatings with sublayer thicknesses of 12 nm with a conventional two-layer design with quarter-wavelength thicknesses. The laser-induced damage threshold of the 14-layer coating is slightly higher than that of the two-layer coating. The AFM surface images show that the 14-layer coating has a smoother surface than the two-layer coating.
© 1996 Optical Society of America
S. Laux, K. Mann, B. Granitza, U. Kaiser, and W. Richter, "Antireflection coatings for UV radiation obtained by molecular-beam deposition," Appl. Opt. 35, 6216-6218 (1996)