Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Dependence of measuring errors of rms roughness on stylus tip size for mechanical profilers

Not Accessible

Your library or personal account may give you access

Abstract

Tracing of a random profile with a mechanical profiler with a spherical tipped stylus has been investigated by means of computer simulation. It is shown that the fractional measuring errors of rms roughness depend on only the ratio of rms roughness σ to the stylus tip radius r and the ratio of rms roughness to the 1/e correlation length ρc. The ratios σ/r were in the range of 0.005–0.05 and the ratios σ/ρc were equal to 0.028 and 0.048.

© 1997 Optical Society of America

Full Article  |  PDF Article
More Like This
Stylus profiling instrument for measuring statistical properties of smooth optical surfaces

J. M. Bennett and J. H. Dancy
Appl. Opt. 20(10) 1785-1802 (1981)

Stylus profiling at high resolution and low force

J. F. Song and Theodore V. Vorburger
Appl. Opt. 30(1) 42-50 (1991)

Effects of finite stylus width in surface contact profilometry

K. A. O’Donnell
Appl. Opt. 32(25) 4922-4928 (1993)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (6)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved