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Applied Optics

Applied Optics


  • Vol. 37, Iss. 13 — May. 1, 1998
  • pp: 2534–2541

Polarizing mirror/absorber for visible wavelengths based on a silicon subwavelength grating: design and fabrication

David L. Brundrett, Thomas K. Gaylord, and Elias N. Glytsis  »View Author Affiliations

Applied Optics, Vol. 37, Issue 13, pp. 2534-2541 (1998)

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A one-dimensional 280-nm period silicon grating designed to exhibit polarization-dependent reflection or antireflection behavior at visible wavelengths has been fabricated and tested. For normally incident 575-nm light, this grating reflects less than 3% of the incident radiation polarized perpendicular to the grating grooves and approximately 23% of the orthogonal polarization. To demonstrate the grating’s broadband characteristics, reflectance measurements are presented over the free-space wavelength range 475 nm < λ0 < 800 nm, for angles of incidence in the range 0° < θ < 40°, for polarization parallel and perpendicular to the grating grooves, and for planes of incidence parallel and perpendicular to the grooves. A description of the fabrication process is also given.

© 1998 Optical Society of America

OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(260.5430) Physical optics : Polarization
(310.1210) Thin films : Antireflection coatings

Original Manuscript: August 13, 1997
Revised Manuscript: December 8, 1997
Published: May 1, 1998

David L. Brundrett, Thomas K. Gaylord, and Elias N. Glytsis, "Polarizing mirror/absorber for visible wavelengths based on a silicon subwavelength grating: design and fabrication," Appl. Opt. 37, 2534-2541 (1998)

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  1. D. C. Flanders, “Submicrometer periodicity gratings as artificial anisotropic dielectrics,” Appl. Phys. Lett. 42, 492–494 (1983). [CrossRef]
  2. R. C. Enger, S. K. Case, “High-frequency holographic transmission gratings in photoresist,” J. Opt. Soc. Am. 73, 1113–1118 (1983). [CrossRef]
  3. R. C. Enger, S. K. Case, “Optical elements with ultrahigh spatial-frequency surface corrugations,” Appl. Opt. 22, 3220–3228 (1983). [CrossRef] [PubMed]
  4. F. Keilman, “Polarized mirror for optical radiation,” Bundesrepublik Deutchland Patent DE3707984 A1 (22September1988).
  5. L. Cescato, E. Gluch, N. Streibl, “Holographic quarterwave plates,” Appl. Opt. 29, 3286–3290 (1990). [CrossRef] [PubMed]
  6. S. Aoyama, T. Yamashita, “Grating beam splitting polarizer using multilayer resist method,” in International Conference on the Application and Theory of Periodic Structures, J. M. Lerner, W. R. McKinney, eds., Proc. SPIE1545, 241–250 (1991). [CrossRef]
  7. N. Davidson, A. A. Friesem, E. Hasman, “Computer-generated relief gratings as space-variant polarization elements,” Opt. Lett. 17, 1541–1543 (1992). [CrossRef] [PubMed]
  8. E. N. Glytsis, T. K. Gaylord, “High-spatial-frequency binary and multilevel stairstep gratings: polarization-selective mirrors and broadband antireflection surfaces,” Appl. Opt. 31, 4459–4470 (1992). [CrossRef] [PubMed]
  9. C. W. Haggans, L. Li, T. Fujita, R. K. Kostuk, “Lamellar gratings as polarization components for specularly reflected beams,” J. Mod. Opt. 40, 675–686 (1993). [CrossRef]
  10. M. Schmitz, R. Bräuer, O. Bryngdahl, “Gratings in the resonance domain as polarizing beam splitters,” Opt. Lett. 20, 1830–1831 (1995). [CrossRef] [PubMed]
  11. M. Schmitz, R. Bräuer, O. Bryngdahl, “Phase gratings with subwavelength structures,” J. Opt. Soc. Am. A 12, 2458–2462 (1995). [CrossRef]
  12. D. L. Brundrett, E. N. Glytsis, T. K. Gaylord, “Subwavelength transmission grating retarders for use at 10.6 μm,” Appl. Opt. 35, 6195–6202 (1996). [CrossRef] [PubMed]
  13. R. E. Smith, M. E. Warren, J. R. Wendt, G. A. Vawter, “Polarization-sensitive subwavelength antireflection surfaces on a semiconductor for 975 nm,” Opt. Lett. 21, 1201–1203 (1996). [CrossRef] [PubMed]
  14. L. Zhuang, S. Schablitsky, R. C. Shi, S. Y. Chou, “Fabrication and performance of an amorphous Si subwavelength transmission grating for controlling vertical cavity surface emitting laser polarization,” J. Vac. Sci. Technol. B 14, 4055–4057 (1996). [CrossRef]
  15. R.-C. Tyan, A. A. Salvekar, H.-P. Chou, C.-C. Cheng, A. Scherer, P.-C. Sun, F. Xu, Y. Fainman, “Design, fabrication, and characterization of form-birefringent multilayer polarizing beamsplitter,” J. Opt. Soc. Am. A 14, 1627–1636 (1997). [CrossRef]
  16. K. H. Brenner, A. Huang, “Optical implementations of the perfect shuffle interconnection,” Appl. Opt. 27, 135–137 (1988). [CrossRef] [PubMed]
  17. K. M. Johnson, M. R. Surette, J. Shamir, “Optical interconnection network using polarization-based ferroelectric liquid crystal gates,” Appl. Opt. 27, 1727–1733 (1988). [CrossRef] [PubMed]
  18. T. J. Cloonan, A. L. Lentine, “Self-routing crossbar packet switch employing free-space optics for chip-to-chip interconnections,” Appl. Opt. 30, 3721–3733 (1991). [CrossRef] [PubMed]
  19. T. J. Cloonan, G. W. Richards, A. L. Lentine, F. B. McCormick, H. S. Hinton, S. J. Hinterlong, “A complexity analysis of smart pixel switching nodes for photonic extended generalized shuffle switching networks,” IEEE J. Quantum Electron. 28, 619–634 (1993). [CrossRef]
  20. C. Waterson, B. K. Jenkins, “Passive optical interconnection network employing a shuffle–exchange topology,” Appl. Opt. 33, 1575–1586 (1994). [CrossRef] [PubMed]
  21. Y. Hayasaki, I. Tohyama, T. Yatagai, M. Mori, S. Ishihara, “Reversal-input superposing technique for all-optical neural networks,” Appl. Opt. 33, 1477–1484 (1994). [CrossRef] [PubMed]
  22. G. Yayla, A. V. Krishnamoorthy, G. C. Marsden, S. C. Esener, “A prototype 3D optically interconnected neural network,” Proc. IEEE 82, 1749–1762 (1994). [CrossRef]
  23. G. A. D. Biase, “Optical multistage interconnection networks for large-scale multiprocessor systems,” Appl. Opt. 27, 2017–2021 (1988). [CrossRef] [PubMed]
  24. K. M. Iftekharuddin, M. A. Karim, “Butterfly interconnection network: design of multiplier, flip-flop, and shift register,” Appl. Opt. 33, 1457–1462 (1994). [CrossRef] [PubMed]
  25. H. S. Hinton, T. J. Cloonan, F. B. J. McCormick, A. L. Lentine, F. A. P. Tooley, “Free-space digital optical systems,” Proc. IEEE 82, 1632–1649 (1994). [CrossRef]
  26. J. Tanida, T. Konishi, Y. Ichioka, “P-opals: pure optical-parallel array logic system,” Proc. IEEE 82, 1668–1677 (1994). [CrossRef]
  27. T. K. Gaylord, E. N. Glytsis, M. G. Moharam, “Zero-reflectivity homogeneous layers and high-spatial frequency surface-relief gratings on lossy materials,” Appl. Opt. 26, 3123–3135 (1987). [CrossRef] [PubMed]
  28. D. H. Raguin, G. M. Morris, “Antireflection structured surfaces for the infrared spectral region,” Appl. Opt. 32, 1154–1167 (1993). [CrossRef] [PubMed]
  29. C. W. Haggans, L. Li, R. K. Kostuk, “Effective-medium theory of zeroth-order lamellar gratings in conical mountings,” J. Opt. Soc. Am. A 10, 2217–2225 (1993). [CrossRef]
  30. D. L. Brundrett, E. N. Glytsis, T. K. Gaylord, “Homogeneous layer models for high-spatial-frequency dielectric surface-relief gratings: conical diffraction and antireflection designs,” Appl. Opt. 33, 2695–2706 (1994). [CrossRef] [PubMed]
  31. P. Lalanne, D. Lemercier-Lalanne, “Depth dependence of the effective properties of subwavelength gratings,” J. Opt. Soc. Am. A 14, 450–458 (1997). [CrossRef]
  32. M. G. Moharam, D. A. Pommet, E. B. Grann, T. K. Gaylord, “Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings,” J. Opt. Soc. Am. A 12, 1068–1076 (1995). [CrossRef]
  33. P. Lalanne, G. M. Morris, “Highly improved convergence of the coupled-wave method for TM polarization,” J. Opt. Soc. Am. A 13, 779–784 (1996). [CrossRef]
  34. A. Bodere, D. Carpentier, A. Accard, B. Fernier, “Grating fabrication and characterization method for wafers up to 2 in,” Mater. Sci. Eng. B 28, 293–295 (1994). [CrossRef]
  35. N. F. Hartman, T. K. Gaylord, “Antireflection gold surface relief gratings: experimental characteristics,” Appl. Opt. 27, 3738–3743 (1988). [CrossRef] [PubMed]
  36. T. H. Tanner, M. Fahoum, “A study of the surface parameters of ground and lapped metal surfaces, using specular and diffuse reflection of laser light,” Wear 36, 299–316 (1976). [CrossRef]
  37. D. F. Edwards, “Silicon (Si),” in Handbook of Optical Constants of Solids, D. F. Edwards, ed. (Academic, Orlando, Fla., 1985), pp. 500–559.
  38. E. H. Anderson, C. M. Horwitz, H. I. Smith, “Holographic lithography with thick photoresist,” Appl. Phys. Lett. 43, 874–875 (1983). [CrossRef]
  39. M. L. Schattenburg, C. R. Canizares, D. Dewey, K. A. Flanagan, M. A. Hamnett, A. M. Levine, K. S. K. Lum, R. Manikkalingam, T. H. Markert, H. I. Smith, “Transmission grating spectroscopy and the Advanced X-ray Astrophysics Facility,” Opt. Eng. 30, 1590–1600 (1991). [CrossRef]

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