Values of the transmittance Ts and the phaseretardation Δ were recorded in situ at two angles duringthe growth of thin films of tantalum oxide, titanium oxide, andzirconium oxide for deposition angles θν in the range40°–70°. Column angles for the same films were determinedex situ from scanning electron microscopy photographs ofdeposition-plane fractures. We show that the experimental columnangles are smaller than the corresponding values predicted by thetangent-rule equation ψ = tan−1(0.5 tan θν) and that the experimental values fit a modifiedform of the equation ψ = tan−1(E1 tan θν) where E1 is less than 0.5. We also show that theprincipal refractive indices are represented well by quadraticfunctions of the deposition angle, for example, n1(θν) = A0 + A2 θν2.
© 1998 Optical Society of America
[Optical Society of America ]
Ian Hodgkinson, Qi hong Wu, and Judith Hazel, "Empirical Equations for the Principal Refractive Indices and Column Angle of Obliquely Deposited Films of Tantalum Oxide, Titanium Oxide, and Zirconium Oxide," Appl. Opt. 37, 2653-2659 (1998)