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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 37, Iss. 15 — May. 20, 1998
  • pp: 3264–3267

Integrated optical micromachined pressure sensor with spectrally encoded output and temperature compensation

Gregory N. De Brabander, Glenn Beheim, and Joseph T. Boyd  »View Author Affiliations


Applied Optics, Vol. 37, Issue 15, pp. 3264-3267 (1998)
http://dx.doi.org/10.1364/AO.37.003264


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Abstract

A promising type of optical pressure sensor combines an integrated optical interferometer with a micromachined diaphragm on a shared silicon substrate. We have demonstrated a sensor of this type that uses an unbalanced Mach–Zehnder waveguide interferometer together with a broadband source to produce a spectrally encoded measurement. This spectral encoding mechanism is advantageous as it is not readily degraded by transmission through optical fibers. We have also demonstrated a means to obtain a temperature-compensated pressure measurement by interrogating both polarization eigenmodes of the interferometer.

© 1998 Optical Society of America

OCIS Codes
(060.2370) Fiber optics and optical communications : Fiber optics sensors
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(130.0130) Integrated optics : Integrated optics
(130.6010) Integrated optics : Sensors
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.3120) Optical devices : Integrated optics devices
(230.3990) Optical devices : Micro-optical devices

History
Original Manuscript: October 8, 1997
Revised Manuscript: February 2, 1998
Published: May 20, 1998

Citation
Gregory N. De Brabander, Glenn Beheim, and Joseph T. Boyd, "Integrated optical micromachined pressure sensor with spectrally encoded output and temperature compensation," Appl. Opt. 37, 3264-3267 (1998)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-37-15-3264

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