Integrated Optical Micromachined Pressure Sensor with Spectrally Encoded Output and Temperature Compensation
Applied Optics, Vol. 37, Issue 15, pp. 3264-3267 (1998)
http://dx.doi.org/10.1364/AO.37.003264
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Abstract
A promising type of optical pressure sensor combines an integrated optical interferometer with a micromachined diaphragm on a shared silicon substrate. We have demonstrated a sensor of this type that uses an unbalanced Mach–Zehnder waveguide interferometer together with a broadband source to produce a spectrally encoded measurement. This spectral encoding mechanism is advantageous as it is not readily degraded by transmission through optical fibers. We have also demonstrated a means to obtain a temperature-compensated pressure measurement by interrogating both polarization eigenmodes of the interferometer.
© 1998 Optical Society of America
OCIS Codes
(060.2370) Fiber optics and optical communications : Fiber optics sensors
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(130.0130) Integrated optics : Integrated optics
(130.6010) Integrated optics : Sensors
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.3120) Optical devices : Integrated optics devices
(230.3990) Optical devices : Micro-optical devices
Citation
Gregory N. De Brabander, Glenn Beheim, and Joseph T. Boyd, "Integrated Optical Micromachined Pressure Sensor with Spectrally Encoded Output and Temperature Compensation," Appl. Opt. 37, 3264-3267 (1998)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-37-15-3264
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