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Applied Optics

Applied Optics


  • Vol. 37, Iss. 19 — Jul. 1, 1998
  • pp: 4080–4083

Low-coherence fiber-optic sensor with a large numerical aperture for topographic measurements

Robert Windecker, Matthias Fleischer, and Hans J. Tiziani  »View Author Affiliations

Applied Optics, Vol. 37, Issue 19, pp. 4080-4083 (1998)

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We describe a compact fiber-optic setup for three-dimensional topometry. The measuring principle is based on low-coherence interferometry in combination with a confocal microscope. Integrating an optical arrangement based on compact disk optics together with fiber optics into one sensor yields a compact unit. The sensor has a numerical aperture of 0.45 and is suitable for measuring large surface slopes with high spatial resolution. Further, a depth measuring range of more than 1 mm can be achieved. The capabilities of our setup for three-dimensional measurements are demonstrated.

© 1998 Optical Society of America

OCIS Codes
(060.0060) Fiber optics and optical communications : Fiber optics and optical communications
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(150.6910) Machine vision : Three-dimensional sensing
(180.1790) Microscopy : Confocal microscopy
(180.3170) Microscopy : Interference microscopy

Original Manuscript: December 5, 1997
Revised Manuscript: March 2, 1998
Published: July 1, 1998

Robert Windecker, Matthias Fleischer, and Hans J. Tiziani, "Low-coherence fiber-optic sensor with a large numerical aperture for topographic measurements," Appl. Opt. 37, 4080-4083 (1998)

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