We describe a compact fiber-optic setup for three-dimensional topometry. The measuring principle is based on low-coherence interferometry in combination with a confocal microscope. Integrating an optical arrangement based on compact disk optics together with fiber optics into one sensor yields a compact unit. The sensor has a numerical aperture of 0.45 and is suitable for measuring large surface slopes with high spatial resolution. Further, a depth measuring range of more than 1 mm can be achieved. The capabilities of our setup for three-dimensional measurements are demonstrated.
© 1998 Optical Society of America
(060.0060) Fiber optics and optical communications : Fiber optics and optical communications
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(150.6910) Machine vision : Three-dimensional sensing
(180.1790) Microscopy : Confocal microscopy
(180.3170) Microscopy : Interference microscopy
Robert Windecker, Matthias Fleischer, and Hans J. Tiziani, "Low-Coherence Fiber-Optic Sensor with a Large Numerical Aperture for Topographic Measurements," Appl. Opt. 37, 4080-4083 (1998)