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Applied Optics

Applied Optics


  • Vol. 37, Iss. 19 — Jul. 1, 1998
  • pp: 4154–4159

Nanoradian angle sensor and in situ self-calibration

Shizhou Zhang, Satoshi Kiyono, and Yutaka Uda  »View Author Affiliations

Applied Optics, Vol. 37, Issue 19, pp. 4154-4159 (1998)

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We describe a high-precision angle sensor and a new calibration system for calibrating the linearity error of an angle sensor under in situ conditions without the need for accurate reference instruments. To achieve accuracy in the nanoradian (nrad) order, we elongated the critical-angle prism to increase the sensitivity, and we added a thermal controller to the angle sensor. This served to suppress thermal drift of the light source to improve stability. The proposed angle sensor demonstrated a stability of 3 nrad over 1 min, and the maximum repeatability error of the calibration curve determined by the in situ self-calibration method was approximately 35 nrad with a measurement range of 500 μrad.

© 1998 Optical Society of America

OCIS Codes
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
(140.2020) Lasers and laser optics : Diode lasers

Original Manuscript: November 13, 1997
Revised Manuscript: February 3, 1998
Published: July 1, 1998

Shizhou Zhang, Satoshi Kiyono, and Yutaka Uda, "Nanoradian angle sensor and in situ self-calibration," Appl. Opt. 37, 4154-4159 (1998)

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