Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Simple method for determining slowly varying refractive-index profiles from in situ spectrophotometric measurements

Not Accessible

Your library or personal account may give you access

Abstract

Reliable control of the deposition process of optical films and coatings frequently requires monitoring the refractive-index profile throughout the layer. In the present research a simple in situ approach is proposed that uses a WKBJ matrix representation of the optical transfer function of a single thin film on a substrate. Mathematical expressions are developed that represent the minima and the maxima envelopes of the curves transmittance versus time and reflectance versus time. The refractive index and the extinction coefficient depth profiles of different films are calculated from simulated spectra as well as from experimental data obtained during the PECVD (plasma-enhanced chemical vapor deposition) of silicon-compound films. Variation in the deposition rate with time is also evaluated from the position of the spectra extrema as a function of time. The physical and mathematical limitations of the method are discussed.

© 1998 Optical Society of America

Full Article  |  PDF Article
More Like This
Spectroellipsometric method for process monitoring semiconductor thin films and interfaces

Morten Kildemo, Romain Brenot, and Bernard Drévillon
Appl. Opt. 37(22) 5145-5149 (1998)

Influence of small inhomogeneities on the spectral characteristics of single thin films

A. V. Tikhonravov, M. K. Trubetskov, Brian T. Sullivan, and J. A. Dobrowolski
Appl. Opt. 36(28) 7188-9198 (1997)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (11)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (22)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved