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Applied Optics

Applied Optics


  • Vol. 37, Iss. 28 — Oct. 1, 1998
  • pp: 6721–6728

Speckle decorrelation in surface profilometry by wavelength scanning interferometry

Ichirou Yamaguchi, Akihiro Yamamoto, and Susumu Kuwamura  »View Author Affiliations

Applied Optics, Vol. 37, Issue 28, pp. 6721-6728 (1998)

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The accuracy and the measurement range of surface profilometry by wavelength scanning interferometry applied to diffusely reflecting surfaces are investigated. The influences of surface roughness and the imaging system in the interferometer are theoretically analyzed by derivation of the autocorrelation function of interferograms arising from wavelength scanning. By using a dye laser with a tuning range of 4.2 nm to a yield resolution of 39.1 μm, we have observed interferograms and their Fourier transforms and autocorrelations to study effects of defocusing and the size ratio of speckle to the CCD pixel for a plane diffuse object positioned normal to the incident beam.

© 1998 Optical Society of America

OCIS Codes
(030.6140) Coherence and statistical optics : Speckle
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(240.5770) Optics at surfaces : Roughness
(240.6700) Optics at surfaces : Surfaces

Original Manuscript: March 11, 1998
Revised Manuscript: June 12, 1998
Published: October 1, 1998

Ichirou Yamaguchi, Akihiro Yamamoto, and Susumu Kuwamura, "Speckle decorrelation in surface profilometry by wavelength scanning interferometry," Appl. Opt. 37, 6721-6728 (1998)

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