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Applied Optics

Applied Optics


  • Vol. 37, Iss. 31 — Nov. 1, 1998
  • pp: 7334–7341

Ellipsometry on sputter-deposited tin oxide films: optical constants versus stoichiometry, hydrogen content, and amount of electrochemically intercalated lithium

Jan Isidorsson, Claes G. Granqvist, Klaus von Rottkay, and Michael Rubin  »View Author Affiliations

Applied Optics, Vol. 37, Issue 31, pp. 7334-7341 (1998)

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Tin oxide thin films were deposited by reactive radio-frequency magnetron sputtering onto In2O3:Sn-coated and bare glass substrates. Optical constants in the 300–2500-nm wavelength range were determined by a combination of variable-angle spectroscopic ellipsometry and spectrophotometric transmittance measurements. Surface roughness was modeled from optical measurements and compared with atomic-force microscopy. The two techniques gave consistent results. The fit between experimental optical data and model results could be significantly improved when it was assumed that the refractive index of the Sn oxide varied across the film thickness. Varying the oxygen partial pressure during deposition made it possible to obtain films whose complex refractive index changed at the transition from SnO to SnO2. An addition of hydrogen gas during sputtering led to lower optical constants in the full spectral range in connection with a blueshift of the bandgap. Electrochemical intercalation of lithium ions into the Sn oxide films raised their refractive index and enhanced their refractive-index gradient.

© 1998 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.4530) Instrumentation, measurement, and metrology : Optical constants
(310.0310) Thin films : Thin films

Original Manuscript: May 19, 1998
Revised Manuscript: July 29, 1998
Published: November 1, 1998

Jan Isidorsson, Claes G. Granqvist, Klaus von Rottkay, and Michael Rubin, "Ellipsometry on sputter-deposited tin oxide films: optical constants versus stoichiometry, hydrogen content, and amount of electrochemically intercalated lithium," Appl. Opt. 37, 7334-7341 (1998)

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