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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 37, Iss. 32 — Nov. 10, 1998
  • pp: 7624–7631

Phase-shifter calibration and error detection in phase-shifting applications: a new method

Bernd Gutmann and Herbert Weber  »View Author Affiliations


Applied Optics, Vol. 37, Issue 32, pp. 7624-7631 (1998)
http://dx.doi.org/10.1364/AO.37.007624


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Abstract

The phase-shifting technique is used in optical metrology to evaluate the local phase of a fringe pattern. Accurate calibration of the shifting device is often essential but sometimes hardly possible because of deviations of the fringe pattern from the ideal sinusoidal shape and because of a nonconstant phase shift between consecutive frames. We introduce a new technique for calculating the phase shift between frames even in the presence of high noise and nonsinusoidal fringe patterns. In addition, this technique permits the identification of different error sources such as low signal-to-noise ratio, higher harmonics contained in the fringe pattern, and nonconstant phase shift.

© 1998 Optical Society of America

OCIS Codes
(110.4280) Imaging systems : Noise in imaging systems
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

History
Original Manuscript: March 9, 1998
Revised Manuscript: June 26, 1998
Published: November 10, 1998

Citation
Bernd Gutmann and Herbert Weber, "Phase-shifter calibration and error detection in phase-shifting applications: a new method," Appl. Opt. 37, 7624-7631 (1998)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-37-32-7624


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References

  1. D. Malacara, ed., Optical Shop Testing, 2nd ed. (Wiley, New York, 1992).
  2. D. W. Robinson, G. T. Reid, eds., Interferogram Analysis (Institute of Physics, Bristol, UK, 1993).
  3. K. Hibino, B. F. Oreb, D. I. Farrant, K. G. Larkin, “Phase shifting of non-sinusodial wave-forms with phase-shift errors,” J. Opt. Soc. Am. A 12, 761–768 (1995). [CrossRef]
  4. J. Schwider, R. Burow, K. E. Elssner, J. Grzanna, R. Spolaczyk, K. Merkel, “Digital wave-front measuring interferometry: some systematic error sources,” Appl. Opt. 22, 3421–3432 (1983). [CrossRef] [PubMed]
  5. K. Creath, “Phase-measurement interferometry techniques,” in Progress in Optics, E. Wolf, ed. (Elsevier, Amsterdam, 1988), Vol. XXVI, pp. 349–393. [CrossRef]

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