We modify groove profile of various blazed gratings with groove densities as great as 3600 lines/mm by dip coating with hardenable liquids with the aim of reducing the blaze angle. The groove profiles resulting from coatings with different layer thickness are measured by atomic force microscopy. A highly reproducible blaze angle reduction to as high as a factor of 6 is achieved with mechanically ruled as well as ion-beam-etched holographic blazed gratings. Blaze angles, to as small as 0.7 deg, which are required for vacuum-UV and soft-x-ray applications but can hardly be formed with sufficient groove profile accuracy by direct ruling, are realized with this coating technique.
© 1998 Optical Society of America
(050.1960) Diffraction and gratings : Diffraction theory
(220.4000) Optical design and fabrication : Microstructure fabrication
(240.5770) Optics at surfaces : Roughness
(260.7200) Physical optics : Ultraviolet, extreme
(310.6870) Thin films : Thin films, other properties
Karlfrid Osterried, Klaus Frieder Heidemann, and Bruno Nelles, "Groove Profile Modification of Blazed Gratings by Dip Coating with Hardenable Liquids," Appl. Opt. 37, 8002-8007 (1998)