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Applied Optics

Applied Optics


  • Vol. 37, Iss. 34 — Dec. 1, 1998
  • pp: 8021–8029

Phase effects owing to multilayer coatings in a two-mirror extreme-ultraviolet Schwarzschild objective

Edita Tejnil, Kenneth A. Goldberg, and Jeffrey Bokor  »View Author Affiliations

Applied Optics, Vol. 37, Issue 34, pp. 8021-8029 (1998)

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The aberrations of a multilayer-coated reflective Schwarzschild objective, which are influenced both by mirror surface profiles and by multilayer coatings, are evaluated with a phase-shifting point diffraction interferometer operating in the extreme ultraviolet. Using wave-front measurements at multiple wavelengths near 13.4 nm, we observed chromatic aberrations and wavelength-dependent transmission changes that were due to molybdenum–silicon multilayer coatings. The effects of chromatic vignetting due to limited multilayer reflection passbands on the imaging performance of the Schwarzschild optic are considered. The coating characteristics extracted from the interferometry data on the two-mirror optical system are compared with previously reported coating properties measured on individual mirror substrates.

© 1998 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(230.4040) Optical devices : Mirrors
(230.4170) Optical devices : Multilayers
(260.7200) Physical optics : Ultraviolet, extreme

Original Manuscript: February 2, 1998
Revised Manuscript: April 27, 1998
Published: December 1, 1998

Edita Tejnil, Kenneth A. Goldberg, and Jeffrey Bokor, "Phase effects owing to multilayer coatings in a two-mirror extreme-ultraviolet Schwarzschild objective," Appl. Opt. 37, 8021-8029 (1998)

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