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Applied Optics

Applied Optics


  • Vol. 38, Iss. 12 — Apr. 20, 1999
  • pp: 2458–2462

Aluminum-coated hollow glass fibers for ArF-excimer laser light fabricated by metallorganic chemical-vapor deposition

Yuji Matsuura and Mitsunobu Miyagi  »View Author Affiliations

Applied Optics, Vol. 38, Issue 12, pp. 2458-2462 (1999)

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A hollow fiber composed of a glass capillary tube and a metal thin film upon the inside of the tube is proposed for the delivery of ArF-excimer laser light. From theoretical analysis, aluminum is chosen as the metal layer. A thin aluminum film is deposited by metallorganic chemical-vapor deposition, with dimethylethylamine alane employed as the source material. Measured loss spectra in vacuum-ultraviolet and ultraviolet regions and losses for ArF-excimer laser light show the low-loss property of the aluminum-coated fiber at the 193-nm wavelength of ArF-excimer laser light. The straight loss of the 1-m long, 1-mm-bore fiber is 1.0 dB.

© 1999 Optical Society of America

OCIS Codes
(060.2290) Fiber optics and optical communications : Fiber materials
(140.2180) Lasers and laser optics : Excimer lasers

Original Manuscript: August 10, 1998
Revised Manuscript: December 11, 1998
Published: April 20, 1999

Yuji Matsuura and Mitsunobu Miyagi, "Aluminum-coated hollow glass fibers for ArF-excimer laser light fabricated by metallorganic chemical-vapor deposition," Appl. Opt. 38, 2458-2462 (1999)

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