A hollow fiber composed of a glass capillary tube and a metal thin film upon the inside of the tube is proposed for the delivery of ArF-excimer laser light. From theoretical analysis, aluminum is chosen as the metal layer. A thin aluminum film is deposited by metallorganic chemical-vapor deposition, with dimethylethylamine alane employed as the source material. Measured loss spectra in vacuum-ultraviolet and ultraviolet regions and losses for ArF-excimer laser light show the low-loss property of the aluminum-coated fiber at the 193-nm wavelength of ArF-excimer laser light. The straight loss of the 1-m long, 1-mm-bore fiber is 1.0 dB.
© 1999 Optical Society of America
Yuji Matsuura and Mitsunobu Miyagi, "Aluminum-Coated Hollow Glass Fibers for ArF-Excimer Laser Light Fabricated by Metallorganic Chemical-Vapor Deposition," Appl. Opt. 38, 2458-2462 (1999)