OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 38, Iss. 14 — May. 10, 1999
  • pp: 2986–2990

Fabrication of microprisms for planar optical interconnections by use of analog gray-scale lithography with high-energy-beam–sensitive glass

Christiane Gimkiewicz, Detlev Hagedorn, Jürgen Jahns, Ernst-Bernhard Kley, and Frank Thoma  »View Author Affiliations


Applied Optics, Vol. 38, Issue 14, pp. 2986-2990 (1999)
http://dx.doi.org/10.1364/AO.38.002986


View Full Text Article

Enhanced HTML    Acrobat PDF (782 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

For an integrated free-space optical interconnection system we suggest the use of microprisms to achieve large coupling angles at low loss. Prisms were fabricated in photoresist and quartz glass by analog lithography. High-energy-beam–sensitive glass was used as the gray-tone mask. Optical testing of the prisms shows acceptable surface quality and high efficiency (95%).

© 1999 Optical Society of America

OCIS Codes
(200.4650) Optics in computing : Optical interconnects
(350.3950) Other areas of optics : Micro-optics

History
Original Manuscript: August 5, 1998
Revised Manuscript: November 23, 1998
Published: May 10, 1999

Citation
Christiane Gimkiewicz, Detlev Hagedorn, Jürgen Jahns, Ernst-Bernhard Kley, and Frank Thoma, "Fabrication of microprisms for planar optical interconnections by use of analog gray-scale lithography with high-energy-beam–sensitive glass," Appl. Opt. 38, 2986-2990 (1999)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-38-14-2986


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. A. Cangellaris, “The interconnect bottleneck in multi-GHz processors: new opportunities for hybrid electrical/optical solutions,” in Proceedings of the Fifth International Conference on Massively Parallel Processing, L. Johnsson, R. Kostuck, E. Schenfeld, M. Snir, eds. (IEEE Computer Society, Los Alamitos, Calif., 1998), pp. 98–103.
  2. S. Sinzinger, J. Jahns, “Integrated micro-optical imaging system with a high interconnection capacity fabricated in planar optics,” Appl. Opt. 36, 4729–4735 (1997). [CrossRef] [PubMed]
  3. K. Reimer, U. Hofmann, M. Jürss, W. Pilz, H. J. Quenzer, B. Wagner, “Fabrication of microrelief surfaces using a one-step lithography process,” in Microelectronic Structures and MEMS for Optical Processing III, M. Motamedi, H. P. Herzig, eds., Proc. SPIE3226, 2–10 (1997). [CrossRef]
  4. E.-B. Kley, W. Dorl, “Einsatz von Elektronenstrahllithograhie zur Herstellung mikrooptischer Bauelemente,” VDI Ber. (Ver. Dtsch. Ing.) 960, 531–541 (1992).
  5. W. Däschner, C. Wu, S. H. Lee, “General aspheric refractive micro-optics fabricated by optical lithography using a high energy beam sensitive glass gray-level mask,” J. Vac. Sci. Technol. B 14, 135–138 (1996). [CrossRef]
  6. M. T. Gale, M. Rossi, L. Stauffer, M. Scheidt, J. R. Rogers, “Integrated micro-optical systems fabricated by replication technology,” in Diffractive Optics and Micro-Optics, Vol. 10 of OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1998), pp. 183–185.
  7. E. M. Strzelecka, G. B. Thompson, G. D. Robinson, M. G. Peters, B. J. Thibeault, M. Mondry, V. Jayaraman, F. H. Peters, L. A. Coldren, “Monolithic integration of refractive lenses with vertical cavity lasers and detectors for optical interconnections,” in Optoelectronic Packaging, M. R. Feldman, Y.-C. Lee, eds., Proc. SPIE2691, 45–53 (1996).
  8. C. Wu, “Method of making high energy beam sensitive glass,” U.S. patent5,078,771, 7January1992.
  9. J. Jahns, S. Sinzinger, M. Testorf, “Scaling considerations for planar optical interconnects,” in Organic Thin Films for Photonic Applications, Vol. 14 of 1997 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1997), paper W53.
  10. B. Lunitz, J. Jahns, “Tolerant design of a planar optical clock distribution system,” Opt. Commun. 134, 281–288 (1997). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited