For an integrated free-space optical interconnection system we suggest the use of microprisms to achieve large coupling angles at low loss. Prisms were fabricated in photoresist and quartz glass by analog lithography. High-energy-beam–sensitive glass was used as the gray-tone mask. Optical testing of the prisms shows acceptable surface quality and high efficiency (95%).
© 1999 Optical Society of America
Christiane Gimkiewicz, Detlev Hagedorn, Jürgen Jahns, Ernst-Bernhard Kley, and Frank Thoma, "Fabrication of Microprisms for Planar Optical Interconnections by Use of Analog Gray-Scale Lithography with High-Energy-Beam-Sensitive Glass," Appl. Opt. 38, 2986-2990 (1999)