Determination of the Refractive Indices of Layers in a Multilayer Stack by a Guided-Wave Technique
Applied Optics, Vol. 38, Issue 19, pp. 4177-4181 (1999)
http://dx.doi.org/10.1364/AO.38.004177
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Abstract
The m-lines technique is used to measure the refractive indices and thicknesses of layers embedded in a multilayer stack. The multilayer considered is deposited by ion plating. Its formula is silica–H–L–H–L–H–air, where H and L denote Ta2O5 and SiO2λ/4 layers, respectively, with λ = 514.5 nm. Measurements indicate that the refractive index of Ta2O5 is 5 × 10−3 greater when the layer is close to air than when the layer is inside the coating and that the Ta2O5 is slightly more birefringent.
© 1999 Optical Society of America
[Optical Society of America ]
OCIS Codes
(230.7390) Optical devices : Waveguides, planar
(260.1440) Physical optics : Birefringence
(290.3030) Scattering : Index measurements
(310.0310) Thin films : Thin films
(310.2790) Thin films : Guided waves
(310.6860) Thin films : Thin films, optical properties
Citation
Josep Massaneda, Francois Flory, and Emile Pelletier, "Determination of the Refractive Indices of Layers in a Multilayer Stack by a Guided-Wave Technique," Appl. Opt. 38, 4177-4181 (1999)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-38-19-4177
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