Highly Corrected Close-Packed Microlens Arrays and Moth-Eye Structuring on Curved Surfaces
Applied Optics, Vol. 38, Issue 2, pp. 352-356 (1999)
http://dx.doi.org/10.1364/AO.38.000352
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Abstract
The fabrication of near-micrometer-sized close-packed coherent microlens arrays on spheric or aspheric surfaces has been accomplished by use of a compact holographic projector system that was developed for producing multimicrometer down to submicrometer grid patterning on curved surfaces. The microlens arrays, which can be utilized as moth-eye relief structures, are formed in a photoimageable bisbenzocyclobutene polymeric resin by a photolytic process involving standing-wave interference patterns from the holographic projector system. Because of absorption, each integral microlenslet of the finished arrays possesses a near-paraboloid contour. The trajectories of the meridional rays from each microlenslet can be optimized to intersect at either a single point or a locus of points.
© 1999 Optical Society of America
OCIS Codes
(040.1240) Detectors : Arrays
(110.3960) Imaging systems : Microlithography
(220.4610) Optical design and fabrication : Optical fabrication
(350.3950) Other areas of optics : Micro-optics
Citation
Kenneth M. Baker, "Highly Corrected Close-Packed Microlens Arrays and Moth-Eye Structuring on Curved Surfaces," Appl. Opt. 38, 352-356 (1999)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-38-2-352
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